| Input Voltage |
220VAC 50/60Hz ,110 V power is available by using a 1000 W transformer (15 A fuse). |
| Output Power |
●1600 VDC
●250 W
●150 mA max.
●Built-in over current protection (>150 mA) |
| Specimen Chamber |
●Quartz glass tube, 165 mm OD.×150 mm ID×250 mm Height |
| Sputtering Head &Specimen Stage |
●2'' flexible magnetron sputtering head with water cooling jacket is included
●One 50 mm Dia stainless steel sample stage is rotatable from 0 - 5 RPM
●One manually operated shutter for target protection.
●Sputtering head holder is available for holding sputtering head while non-operation.
●The distance between the sputtering head and sample stage is adjustable from 60 - 100 mm.
●Max Coating area: 4" diameter max.
●One Air Cold Recirculating Water Chiller 10 L/min Flow is included for cooling sputtering head. |
| Control Panel |
●6'' color touch-screen control panel with PLC integration for easy operation.
●One panel for all parameters monitor and control: vacuum, current. |
| Ultimate Vacuum Pressure |
●Built-in KF25 vacuum port
●The system requires an Ar gas tank with pressure regulator. (not included)
●< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air)
●< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
●The lowest vacuum may reach <4.0E-6 Torr by pumping overnight and baking |
| Gas Atmosphere |
●One needle valve installed to allow Ar gas inlet to achieve better plasma coating
●The system requires an Ar gas tank with pressure regulator (not included) |
| Target |
One 2" Copper target is included for testing, Target size: 2" Dia.×2.5mm.
It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every kind of metallic material.
Warning: Aluminum ,Chromium or Nickel Target can be coating by this machine, but please view the Recommend Coating Method before using.Please using RF Plasma Magnetron Sputtering for coating Alumina |
| Overall Dimension |
L 440 mm×W 330 mm × H 290 mm |
| Net Weight |
20 kg |
| Warranty |
One year limited with lifetime support |
