Small double sputter source magnetron sputtering coater

Products Inquiry

Name * :

Tel * :

Email :

CompanyName :

Message :

Product Details

CY-MSP210S-RFD small dual-target magnetron sputtering coating equipment has been miniaturized, while retaining the high-vacuum stainless steel cavity, while simplifying other mechanisms, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply and an RF power supply. The DC target can be used for sputtering of metals and other conductive materials. The RF power supply can be used for sputtering of various non-metals and metal oxides. The equipment vacuum system adopts all imported vacuum pumps, with fast pumping speed, high ultimate vacuum and excellent vacuum performance. The equipment has compact structure, perfect functions and easy to use. It is very suitable for various coating tests.

Technical parameters of magnetron sputtering coating equipment:

Sample stage	Size	φ150mm
	Rotating speed	0-20 adjustable
	Heating	Up to 500℃
Magnetron sputtering target	Quantity	2” x2 dual targets share a baffl
Vacuum chamber	Chamber size	φ210mm x 230mm
	Chamber material	SS304 stainless steel
	Observation window	φ40mm
	Opening method	Front door
Vacuum system	Mechanical pump	Imported oil-free diaphragm pump
	Pumping interface	KF16
	Molecular pump	Imported molecular pump
	Pumping interface	KF40
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge + ionization gauge
	Ultimate vacuum	1.0E-3Pa
	Pumping rate	Oil-free pump 0.49L/s Molecular pump: 40L/S
	Power supply	AC 220V 50/60Hz
	Quantity	DC power supply x1 RF power supply x1
	Maximum output power	DC power supply 500W RF power supply 500W
Other	Supply voltage	AC220V, 50Hz
	Total power	2kW
	Overall size	550mm x 550mm x1100mm

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.