Desktop single sputter head magnetron sputtering coater HS-MSP180G-DC

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Product Details

This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise.

Technical parameter:

Sample stage	Size	φ100mm
	Heating	Max. 500℃
	Rotating speed	0-20rpm adjustable
Magnetron sputtering head	Quantity	2" x1
Vacuum chamber	Chamber size	φ180mm x 215mm
	Observation window	Omnidirectional transparent
	Chamber material	High purity quartz
	Open method	Upper cover removable
Vacuum system	Mechanical pump	Rotary vane pump
	Pumping port	KF16
	Exhaust interface	KF16
	Molecular pump	Turbomolecular pump
	Pumping port	KF40
	Exhaust interface	KF40
	Vacuum measurement	Resistance gauge + ionization gauge
	Ultimate vacuum	1.0E-4Pa
	Power supply	AC 220V 50/60Hz
	Pumping rate	Mechanical pump 1.1L/s Molecular pump 600L/s
Power configuration	Quantity	DC power supply x1
	Max. output power	DC power supply 150W
	Supply voltage	AC220V, 50Hz
Others	Total power	2kW
Others	Overall size	550mm x 350mm x 400mm

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