System standard accessories | |
Equipment size | 1105W * 1488D * 1842Hmm (2158mm with signal light height) |
Horizontal plate | 8layer |
Electrode plate | 402W * 450Dmm |
Gas flow controller | 2 process gases ,0-300ml/min |
Vacuum measurement | Japanese ulvac vacuum gauge |
Human machine interface touch screen | SD independent research and development |
Electrode spacing | 48mm |
Signal indicator | 3 ibbon alert |
Vacuum pump | 90m3/h bipolar oil pump |
System Power & Machinery | |
Power supply | AC380V, 50/60Hz ,Rated power 5000W |
System weight (device host / vacuum pump) | <600Kg |
Floor area: equipment host | 1805(W)×1988(D)×1842(H) mm |
RF power supply | |
RF power frequency | 13.56MHz |
RF power supply | 1000W |
RF power matcher | Fully automatic matching, leading air capacitance technology |
Equipment prerequisites | |
Power supply | AC380V, 50/60Hz, three-phase five-wire, 7.5KVA |
Compressed air requirements | Anhydrous oil-free CDA 60~90psig |
Exhaust system | ≥ 2 cubic / minute, the central exhaust gas treatment pipeline can be |
System ambient temperature requirements | ≤30℃(best room temperature) |
Process gas requirements | 15~20psig Purity 99.996% or above |