Main parts | Item | Parameters |
Cleaning the chamber | Chamber material | High purity quartz |
Chamber size | Diameter 200 mm; Length 340 mm | |
RF power supply | Power supply features | The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products. |
Power advantage |
● Long time normal operation ● Simple and flexible operation ● High power supply efficiency and low heat generation ●With perfect reflection power protection function |
|
RF power | 0~100W continuously adjustable/0~150W continuously adjustable | |
Signal frequency | 13.56MHz ±0.005% | |
Reflected power | ≤100W | |
Power stability | ±0.1% | |
RF connector | N type connector | |
Machine efficiency | ≥75% | |
Harmonic component | ≤-50 dBc | |
cooling method | Forced air cooling | |
Gas measurement | Measuring unit | Float flowmeter |
Gas channel | Two channels | |
A channel range | 10~100ml | |
B channel range | 16~160ml | |
Vacuum | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
Vacuum pump | Two-stage rotary vane vacuum pump | |
Motor speed | 50 Hz: 1440; 60 Hz: 1720 | |
Pumping rate | 50 Hz: 1.1L/s; 60 Hz: 1.3L/s | |
Vacuum range | 0.1Pa~10000Pa | |
Ultimate vacuum | 0.5Pa | |
Motor noise | ≤56dB | |
Pipe interface | Gas inlet: KF16; exhaust port KF16. | |
Connecting pipe | KF16 vacuum bellows | |
Vacuum valve | Solenoid valve | |
Motor Power | 400W | |
Others | Power supply | AC220V 50/60Hz |
Total power | 550W/600W | |
Operating temperature | -10℃- 40℃ | |
Working vacuum | ≤40Pa | |
Overall size | 600mm×500mm×560mm | |
Total Weight | 80kg (including packaging) |