Chamber & Vacuum Chuck | Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square Spinning chamber is made of PP which is corrosive resistant One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers 1 piece of Adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates or wafer with size < 6" Place the irregularly shaped substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction |
Spin Speed | Digital control panel with two programmable segments of different spin times and speeds 500 - 6000 RPM adjustable spinning speed for each segment |
Liquid Injecting | 20mL syringe is used to contain the coating material |
The syringe holder height can be adjusted and rotated freely along the support rod | |
Input Power | AC 110V/220V selectable There is a built in power socket on the right side of the VTC-200 spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built in power socket will supply AC 110V) |
Motor Power | 90VDC, 150W |
Product Dimensions | 500mm(L) x 400mm(D) x 400mm(H) |
Net Weight | 20 kg (44 lbs) |
Compliance | CE Certified |
Warranty | One year limited with lifetime support Rusting and damage due to improper storage condition or maintenance are not covered by warranty |
Warnings | Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base. If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. |
Shipping Dimensions | 45"(L) x 30"(W) x 30"(H) |
Shipping Weight | 46 kg (100 lbs) |