Small high vacuum thermal evaporation coater | ||||
Sample stage | Size | Φ65mm | Distance to evaporation source | 60mm~100mm adjustable |
Rotary speed | 1-20rpm adjustable | |||
Evaporation system | Evaporation source | Tungsten wire basket | Max temperature | 1700℃ |
Thermocouple | S type thermocouple | |||
Vacuum chamber | Chamber size | φ170mm × 200mm | Observation Window | Quartz observation window φ70 |
Chamber material | Stainless steel | Opening way | Top cover open | |
Vacuum system | Model | HS-GZK103-A | Pumping interface | KF40 |
Molecular pump | HS-600 | Exhaust interface | KF16 | |
Backing pump | Rotary vane pump | Vacuum measurement | Compound vacuum gauge | |
Ultimate vacuum | 1.0E-5Pa | |||
Pumping ate |
Molecular pump: 600L/S rotary Rotary vane pump: 1.1L/S comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa |
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Other parameters | Supply voltage | AC220V,50Hz | Dimensions | 600mm×300mm×470mm |
Total power | 1.5kw | Total weight | 40kg |