Small evaporation coating machine | ||||
Sample Stage | Size | φ80mm | Distance to the evaporation source | 20mm~50mm adjustable |
DC sputtering head | evaporation source | Tungsten wire basket | Highest Temperature | 1700℃ |
Thermal couple | S type Thermal couple | |||
Vacuum Chamber | Chamber Size | φ180mm×100mm | Watch Window | Omnidirectional transparency |
Chamber Material | High purity quartz | opening mode | Top cover removable | |
Vacuum System | Mechanical Pump | Rotary vane pump | Pumping connector | KF16 |
vacuum measurement | resistance gauge | Air exhaust connector | KF16 | |
Ultimate vacuum | 1.0E-1Pa | Power Supply | AC;220V 50/60Hz | |
Pumping rate | Rotary vane pump:1.1L/S | |||
Other | Supply Voltage | AC220V,50Hz | Overall size | 360mm×300mm×470mm |
Total Power | 800w | Total Weight | 15kg |