Two temperature zone tube furnace

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Product Details

Two temperature zone tube furnace consists of a dual temperature zone tube furnace, a temperature controlled evaporator and a humidity monitor. The combination of the temperature-controlled evaporator and the humidity monitor can continuously produce water vapor that meets the test ratio requirements, that is, by observing the humidity monitor's indication, the rate of water vapor generation can be adjusted by adjusting the heating rate of the temperature-controlled evaporator accordingly. If combined with a three channel float flowmeter, precise control of the gas composition and humidity can be achieved, which is suitable for liquid source and chemical precursor transport in CVD processes.
The tube of the tube furnace horizontally passes through the furnace chamber, the heating element is evenly distributed around the circumference, the temperature field is uniform, and the internal and external temperature difference between the furnace tube and the furnace can be controlled at about 3℃. The furnace body is designed with a cushioned upper cover support structure for safe opening during operation.
The combination of the two-temperature zone vacuum tube furnace is mainly suitable for CVD tests and reactions requiring control of reaction humidity.

Two temperature zone tube furnace technical parameters:

Item		Detail
Two zone tube furnace	Supply voltage	AC110V;60Hz
	Working temperature	≤1100℃
	Heating rate	Recommended 10℃/min
	Thermocouple type	B-type thermocouple
	Furnace tube size	φ80(OD)×φ74(ID)×1000(L)mm
	Furnace tube material	High purity quartz
	Sealing flange	Gas and vacuum interface with 1/4 inch
	Heating zone	200mm+200mm
	Temperature control	1) PID fully automatic control of heating rate, cooling rate and holding time 2) PID control over temperature protection and short protection 3) Over-temperature protection in the alarm function allows the device to operate unattended 4) Temperature control accuracy is ±1℃(ie the displayed temperature and actual temperature difference)
	Heating element	Electric furnace wire
Evaporator	Capacity	300mL
	Heating jacket operating temperature	≤250℃
	Features	With precision programmable temperature controller control; There are two SS needle valves and a pressure gauge on the container
Humidity monitor	Installation method	KF25 adapter connected to the processing tube flange
	Measuring range	0-100% RH, 1.5% FS accuracy, or -60° to +60°DP
	Measurement accuracy	±0.3°
	Usage	Adjust the evaporator water temperature and H₂gas flow to achieve the desired humidity level
Three-channel anti-corrosion float flowmeter	Valve type	Stainless steel needle valve
	Normal pipe condition	shut down
	Gas mode	3 channels
	Connection size	1/4"
	Pressure range	-0.1~0.15Mpa
	Tube core material	304 stainless steel

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