Product Description
mass flow controller ( MFC ) for tube furnace CVD system
The gas control system is designed for the control of 1-4 types of gases flowing through vacuum-sealed tube furnaces at a low cost. The gas control system is installed in a heavy duty mobile
cart where the tube furnace can be placed on the top. The front panel in the system has adjust
valves and displays for the flow rate of gases. By combining with tube furnaces, it can be used as CVD system and annealing furnace to study the gas environmental influence has on materials.
Specification
Function | Two Channels | Three Channels | Four Channels |
Mass Flow Controller | Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45C Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 1~500 SCCM | Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45C Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500 SCCM | Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45C Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500sccm |
Removability | 4 heavy duty wheels included Max load: 500 Lbs | ||
Mechanical Pressure Gauge | Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid) | ||
Needle Valve | 316 Stainless Steel | ||
Pipe fitting | Pipe fitting: 1/4" stainless steel 12'' length 1/4" ID Nylon pipe for immediate use | ||
Gas mixing tank | Φ80X120mm | ||
Stop valve | 316 stainless steel needle valve, Φ1/4" | ||
Dimension | 600x600x650 mm | ||
Compliance | CE certified | ||
Warranty | One year limited with lifetime support |
Service
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C