Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

Basic InfoModel NO.: HS-RFStructure: DesktopCertification: CE, TUVType: Reaction TypeCooling: AirRF Frequency: 13.56MHzTrademark: CYSpecification: 500WHS Code: 85141090Customized: CustomizedMaterial: AlloyApplication: SchoolMatching: AutomaticOutput Type: N TypeWarranty

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Product Details

Product Description
RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

SPECIFICATIONS

Noise	<50 db="">
Output Power	5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)
RF frequency	13.56 MHz ±0.005% stability
Reflection Power	200W max.
Matching	Automatic
RF Output Port	50 Ω, N-type, female
Cooling	Air cooling
Power	208-240VAC, 50/60Hz
Tube Size	50 - 130 mm ( 2''- 5'' OD) ( larger diameter coil up to 11" diameter is available upon request )
Application	Combine with tube furnace to get PECVD system
other details	can be desigbed as your requirement