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Compact CVD Tube Furnace with 2"OD Quartz tube furnace and 3 gas mixer HS-O1200-50IS-3Z10V

Model No.HS-O1200-50IS-3Z10VDisplayLED digital gaugeLimiting temperature1200℃Working temperature≤1100℃Heating rate0-20℃/minHeating Zone length200mm, co
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Product Details

 Model No. HS-O1200-50IS-3Z10V
 Display LED digital gauge
 Limiting temperature 1200℃
 Working temperature ≤1100℃
 Heating rate 0-20℃/min
 Heating Zone length 200mm, constant temperature zone:80mm
 Quartz tube diameter OD50*700mm
 Temperature accuracy ± 1℃
 Heating element Fe-Cr-Al alloy adopt by Mo
 Thermal couple K TYPE
 Cooling method Double layer structure with fan cooling
 Temperature control 30 steps programmable PID control
 Chamber material Alumina fiber
 Vacuum pump Mechanical rotary vacuum pump:10-2Torr
Turbo pump with rotary vacuum pump:10-5Torr
 Cooling method Air cooling
 Connection pipe stainless steel bellows, manual flap valve
 Gas Mixer 3 way gas mixer
 Working pressure： -0.1MPa~0.15MPa
 MFC1 Range 0~100SCCM
 MFC2 Range 0~200SCCM
 MFC3 Range 0~500SCCM
 Working voltage AC220V,50Hz