1200℃ three heating zone low vacuum CVD system with 3-channel mass flow meter HS- O1200-50IIIT-3Z-LV

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Product Details

1200℃ three heating zone low vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

1200℃ three heating zone low vacuum CVD system applications:
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ three heating zone low vacuum CVD system technical parameters:

Vacuum tube furnace	Model	HS-O1200-50IIIT
	Tube material	High purity quartz
	Tube diameter	50mm (Optional 60mm, 80mm, 100mm)
	Tube length	1300mm
	Furnace chamber length	1060mm
	Heating zone length	300mm+300mm+300mm
	Operating temperature	0～1100℃
	Temperature control accuracy	±1℃
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
Gas supply system	Model	HS-3Z
	Gas channel	3-channel
	Measuring unit	Gas mass flow meter
	Measuring range	A channel: 0～100SCCM H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
		B channel: 0～300SCCM N2 gas
		C channel: 0～500SCCM Ar gas
	measurement accuracy	±1.0%F.S
	Pipe pressure resistance	3MPa
	Working pressure difference	50～300KPa
	Connecting pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface specification	1/4" ferrule connector for gas inlet and outlet
Exhaust system	Mechanical pump	Rotary vane pump
	Pumping rate	1.1L/S
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge
	Ultimate vacuum	1.0E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF16

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