Single heating zone rotary PECVD graphene preparation tube furnace

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Product Details

Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.
The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.
This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.

Technical parameters of rotary PECVD tube furnace:

RF power supply	Output Power	150W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Air-cooling
1200℃ Single heating zone tube furnace	Supply voltage	AC220V, 50Hz
	Maximum power	2KW
	Heating zone	Single heating zone 200mm
	Working temperature	Maximum 1200℃, continuous operating temperature should be ≤1100 ℃
	Temperature accuracy	± 1 ℃
	Temperature control method	AI-PID 30-stage process curve, can store multiple Three temperature zone independent control, with overheat and thermocouple failure protection
	Furnace tube material	High purity quartz
	Furnace tube size	Dia. 50x800mm
	Sealing method	Vacuum stainless steel flange, KF16 flange
	Adjustable speed	0-20rpm
	Furnace tilt angle	0-15°
	Vacuum pump	Rotary vane mechanical pump
	Ultimate vacuum	1.0E-1Pa
	Feeding method	Vacuum funnel and screw feed

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