model | ZVG-060609 | ZVG-080812 | ZVG-101015 | ZVG-131320 | ZVG-151530 | ZVG-202040 |
Work area size W×H×L(mm) |
600×600×900 | 800×800×1200 | 1000×1000×1500 | 1300×1300×2000 | 1500×1500×3000 | 2000×2000×4000 |
Maximum temperature (°C) | 2600 | 2600 | 2600 | 2600 | 2600 | 2600 |
Temperature uniformity (°C) | ±7.5 | ±7.5 | ±10 | ±10 | ±15 | ±20 |
Ultimate vacuum (Pa) | 50 | 50 | 50 | 50 | 50 | 50 |
Pressure rise rate (Pa/h) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 |