Magnetron sputtering/vacuum evaporation composite coating equipment HS-MSE300S-DC

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Product Details

The magnetron sputtering/vacuum evaporation composite coating equipment combines magnetron sputtering technology and vacuum evaporation technology in one coating equipment. In this device, magnetron sputtering cathode glow discharge is used to sputter the target atoms and partially ionize and deposit them on the substrate to form a film, and at the same time, the metal plating material can be melted in a vacuum by resistance heating and vaporized and then deposited on the substrate to form a film. This increases the utility and flexibility of the device. The equipment is used for metallization of plastic surface such as mobile phone case and deposition of non-conductive film and electromagnetic shielding film.

The magnetron sputtering/vacuum evaporation composite coating equipment is equipped with a plasma processing device, a high-efficiency magnetron sputtering cathode and a resistance evaporation device, etc. The deposition rate of this device is fast, the coating adhesion is good, the plating layer is fine and compact, the surface finish is high, the uniformity and consistency is good; the machine realizes full automatic control of coating process, large load, reliable work, high qualification rate, low production cost and green environmental protection.

Magnetron sputtering/vacuum evaporation composite coating equipment application:
The device is widely used in computer casings, mobile phone cases, household appliances and other industries, and can be coated with metal film, alloy film, composite film layer, transparent (translucent) film, non-conductive film, electromagnetic shielding film and the like.

Magnetron sputtering/vacuum evaporation composite coating equipment specifications:

Product Model		Magnetron sputtering/vacuum evaporation composite coating equipment CY-MSE300S-DC
Sample stage		Size	Φ185mm
		Temperature control accuracy	±1℃
		Rotating speed	1-20rpm adjustable
		Sputter current	2~20mA
		Sputter voltage	1000V
		Evaporation source	Tungsten wire basket
		Maximum temperature	1700℃
		Precise temperature control	30-segment lifting and lowering temperature program can be set
Vacuum chamber		Chamber size	φ300mm × 300mm
		Watch window	φ100mm
		Chamber material	Stainless steel
		Opening method	Top over open
Film thickness monitor	Monitoring components	Power supply	DC 5V (±10%), maximum current 400mA
		Frequency resolution	±0.03Hz
		Film thickness resolution	0.0136Å (aluminum)
		Film thickness accuracy	±0.5%, depending on process conditions, especially sensor position, material stress, temperature and density
		Measuring speed	100ms-1s/times, settable
		Measuring range	500000Å (aluminum)
		Standard sensor crystal	6MHz
		Computer interface	RS-232/485 serial interface (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8, stop bit: 1, check: none)
		Analog output	8-bit resolution, PWM pulse width modulated output (open collector or internal 5V output)
		Working environment	Temperature 0-50℃, humidity 5%-85% RH, no condensation beads
	Displayer	Input power	AC 220V±10%
		Output power	DC 5V 3A
		Displayer	12×2 digital tube and LED
		Communication port	RS-485 (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8 bits, stop bit: 1 bit, parity: none)
	Probes	Applicable wafer frequency	6MHz
		Applicable wafer size	Φ14mm
		Mounting flange	CF35
		Cooling water pipe	Φ3mm, length 00mm, 500mm, 1000mm
		Cooling water pressure	<0.3MPa
		Pneumatic baffle pipe	Φ3mm
		Baking temperature	Water supply state <200℃, water-free state flange <100℃
		Electrical Interface	BCN socket
Mass flowmeter		2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system		Model	CY-GZK103-A
		Pumping interface	KF40
		Molecular pump	CY-600
		Exhaust interface	KF16
		Backing pump	Rotary vane pump
		Vacuum measurement	Compound vacuum gauge
		Ultimate vacuum	1.0E-5Pa
		Power supply	AC;220V 50/60Hz
		Pumping rate	Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive pumping performance: The vacuum can reach 1.0E-3Pa in 20 minutes.
Optional accessories		Various targets such as gold, indium, silver, and platinum
Warranty		One year warranty, lifetime technical support.

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