Item | Detail | |
Spin coater | Supply voltage | AC220V, 50Hz |
Spin speed | 0~10000rpm | |
Acceleration | 100~5000rpm/s | |
Speed resolution | 1rpm | |
Single step time | 3000s | |
Substrate size | Diameter ≤ 8 inches (200mm) | |
Chamber material | Aluminum alloy | |
Operation method | 7 inches HD LCD touch screen | |
Dispensing method | Manual dispensing, optional precision syringe pump | |
Coating curve | 5 segments per curve, a total of 5 curves can be stored | |
Pumping port | Φ6mm quick screw interface | |
Overall size | 290mm×365mm×260mm | |
Total Weight | 10kg | |
Exhaust system | Vacuum pump | Dry mechanical pump |
Pumping rate | 1.1L/s | |
Power supply | AC220V 50/60Hz |