Multi evaporation sources high vacuum evaporation coating equipment

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Product Details

This equipment is a multi-source high-vacuum evaporation coating equipment. The equipment adopts a front-opening vacuum chamber design. The chamber has a large space and strong expandability, which can meet the evaporation coating of multiple types of large-size samples. The chamber has an upper sample stage inside, and the clamping or clamping type sample mounting parts can be selected according to the user's sample style. The sample table can be rotated, heated and raised and lowered, and all operations are integrated and controlled through the touch screen. The vacuum pump set of the equipment is a two-stage vacuum system, which is composed of a dual stage rotary vane vacuum pump and a turbo molecular pump. It can provide a clean and oil-free high vacuum environment for the vacuum coating test; the vacuum system contains a complete pneumatic valve system, and the user can One-touch operation through the touch screen realizes vacuuming, non-stop load and unload sample, complete shutdown and other operations.
The equipment has two sets of evaporation sources. It adopts a tungsten boat evaporation source and water-cooled copper electrodes. It can support a maximum current of 300A and a heating temperature of up to 3000℃. It can realize the evaporation of various refractory metals. This equipment adopts an integrated design, and the chamber and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users. The electric control part adopts the design of the combination of touch screen and button panel. The vacuum system, sample table and other auxiliary functions are operated by the touch screen with one button. The evaporation and the film thickness control are operated independently by the panel, which is as convenient for users as possible while avoiding the possibility of wrong operation. The equipment is well-designed and has excellent performance, and it is an indispensable choice for laboratory high-precision evaporation coating test.

Technical parameters of multi-source high-vacuum evaporation coating equipment:

Sample stage	Size	Max support φ150mm sample
Sample stage	Height	Adjustable up and down 70mm
Evaporation source	Quantity	Tungsten Boat x2
Vacuum chamber	Chamber size	Dia. 300mm x 400mm
	Chamber material	304 stainless steel
	Observation window	Front φ100mm with shading sheet
	Opening method	Front door open
Film thickness control	Crystal vibrating film thickness measuring instrument, optional multi-channel film thickness controller
Vacuum system	Backing pump	Dual stage rotary vane pump
	Pumping port	KF16
	Secondary pump	Turbo molecular pump
	Pumping port	CF160
	Vacuum measurement	Resistance + ionization Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa
	Pumping rate	Rotary vane pump: 1.1L / S
	Exhaust rate	Mechanical pump 1.1L / s Molecular pump 600L / s
	Power supply	AC 220V 50/60Hz
Flow meter	One channel mass flow meter 500sccm Ar gas
Control System	PLC automatic control Operation interface: touch screen + operation panel
Other	Supply voltage	Supply voltage
	Total power	5kW
	Machine size	1000mm x 800mm x 1500mm
	Machine weight	350kg

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