Item | Detail |
Supply voltage | AC220V,60Hz |
Max. power | 1000W |
Sample stage | Diameterφ60mm |
Quartz chamber | O.Dφ180mm x I.Dφ166mm x 100mm |
Evaporation source | Tungsten basket/tungsten boat |
Max temperature | 1700℃ |
Thermocouple | B-type, working temperature 200℃~1500℃ |
Vacuum gauge | Resistance type vacuum gauge |
Vacuum interface | KF16 |
Inlet interface | φ6.35mm Bite type fittings |
Vacuum pump | No, the customer provides it |
Dimensions | 330x250x580mm |