High vacuum mini CVD tube furnace

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Product Details

This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200℃. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1℃.
The tube furnace adopts temperature control meter operation in operation, can preset the temperature control curve, one-button start and stop, easy to use, can simplify the experiment operation and save the experiment time. The high-vacuum molecular pump group can effectively increase the background vacuum and improve the quality of the reaction product.

High vacuum mini CVD tube furnace technical parameters:

1200℃ mini-tube furnace parameters
Supply voltage	AC220V, 50Hz
Maximum power	2KW
Heating zone	Single heating zone 200mm
Constant temperature zone head	100mm
Heating element	Heat-resistant alloy wire
Thermocouple	K type
Operating temperature	≤1150℃
Heating rate	Suggest ≤10℃/min
Temperature control accuracy	Suggest ≤10℃/min
Temperature control method	AI-PID 30-segment process curve, with overheat and thermocouple failure protection
Furnace tube material	High purity quartz
Furnace tube size	φ50mm O.D x 450mm L
Vacuum pump	Mechanical pump pumping speed 1.1L/s
Ultimate vacuum	5Pa
Three-channel float flowmeter parameters
Valve type	Stainless steel needle valve
Number of gas paths	Three
Pressure range	0.05~0.3MPa
Range	160 SCCM (Air)
Mixing tank volume	750mL
Gas path material	304 stainless steel
Pipe interface	6.35mm ferrule connector
Molecular pump parameters
Product number	HS-GZK103-A
Molecular pump	Turbomolecular pump
Backing pump	Two-stage rotary vane pump
Pumping rate	Molecular pump: 6000L/S	Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
	Rotary vane pump: 1.1L/S
Ultimate vacuum	5×10E-4Pa
Pumping port	KF40
Exhaust interface	KF16
Vacuum measurement	Compound vacuum gauge

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