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1200℃ low vacuum rotary CVD system with 3-channel float flowmeter HS-O1200-60IIIC-R

The three temperature zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperatu
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The three temperature zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and open circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere environment in the pipeline.
If you need to maintain a single grain structure (such as when drying or calcining materials), a rotary tube furnace is ideal for you. The combination of continuous rotary motion and atmospheric protection of the furnace tube enables the mixing and mixing of the materials in the tube to achieve uniform heating effect, which will bring you the ideal treatment result.

1200℃ low vacuum rotary CVD system applications:
The main application fields of the equipment are: powder metallurgy, ceramics, refractory materials, lithium battery anode and cathode materials, new energy and other industries particle powder firing, calcining, determination of materials.


1200℃ low vacuum rotary CVD system technical parameters:
 Vacuum tube   furnace Max power 4.5kw
Tube material High purity quartz
Tube diameter 60mm at both ends, 100mm in the middle
Tube length 1400mm
Furnace chamber   length 600mm
Heating zone   length 200mm+200mm+200mm
Operating   temperature 0~1100℃
Temperature   control accuracy ±1℃
Temperature   control mode 30 or 50 segment program temperature control
Display mode Highlight digital display
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V   50/60Hz
Inclination angle 0~15°
Rotating speed 0~20 rpm
 Gas supply   system Model HS-3F
Gas channel 3-channel
Measuring unit Gas float flowmeter
Measuring   range A channel: 0~100ml  H2 gas Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.
B channel: 16~160ml  N2   gas
C channel: 25~250ml  Ar gas
measurement   accuracy ±2.0%
measurement   accuracy 3MPa
Working   pressure difference 50~300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface   specification 1/4" ferrule connector for gas inlet and outlet
 Exhaust   system Mechanical   pump Rotary vane pump
Pumping rate 1.1L/S
Exhaust   interface KF16
Vacuum   measurement Resistance gauge
Ultimate   vacuum 1.0E-1Pa
Power supply AC:220V  50/60Hz
Pumping   interface KF16
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