Small double furnaces sliding tube furnace HS-O1200-50SDM

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Product Details

The two furnace bodies can slide on the slide rails to achieve evaporation/sublimation of the raw materials and film deposition. To achieve the fastest heating, the furnace can be preheated to the set temperature and the furnace moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating, which is the ideal furnace for low-cost rapid heat treatment.
At the same time, electric slide rails, mass flow meter (MFC) controlled gas supply system and plasma RF power supply can be selected to build the TCVD system.
The device can be used for graphene preparation, sulfide preparation, and the like.

Small double furnaces sliding tube furnace technical parameters:

Micro tube furnace	Model	HS-O1200-50SDM
	Tube material	High purity quartz
	Tube diameter	50mm(optional 60mm, 80mm, 100mm)
	Tube length	1400mm
	Furnace chamber length	300mm
	Heating zone length	200mm
	Operating temperature	0～1100℃
	Temperature control accuracy	±1℃
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	Highlight the digital tube digital display
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
Gas supply system	Model	HS-3F
	Gas channel	3-channel
	Measuring unit	Gas mass flow meter
	Measuring range	A channel: 0～100SCCM H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
		B channel: 0～300SCCM N2 gas
		C channel: 0～500SCCM Ar gas
	measurement accuracy	±1.0%F.S
	Pipe pressure resistance	3MPa
	Working pressure difference	50～300KPa
	Connecting pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface specification	1/4" ferrule connector for gas inlet and outlet
Exhaust system	Mechanical pump	Rotary vane pump
	Pumping rate	1.1L/S
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge
	Ultimate vacuum	1.0E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF16

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