DC Magnetron Sputtering &evaporation coater | |
Model No. | HS-1100X-SPC-16C |
Target diameter | Φ50mm |
Sample stage | Φ50mm |
Chamber dimension | Φ160*110mm |
Vacuum degree | 4×10-1mbar-2×10-2mbar |
Maxi working current | 50mA |
Maxi Time setting | 9999s |
Maxi voltage | 1600VDC, adjustable |
Vacuum pump | Two stage rotary vacuum pump |
Working voltage | AC220V 50Hz |