Multi-function coating machine: Plasma Sputtering & Thermal evaporating & Carbon Coating

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Product Details

The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon. By changing the function kit, the device can quickly switch between multiple functions, which is very suitable for making SEM samples in the laboratory. This instrument is equipped with a mechanical pump and a molecular pump, which can meet a variety of vacuum requirements, especially high vacuum, and can effectively improve the quality of coating.

Technical parameters:

Product model	HS-PEC250G-HV
Vacuum chamber	Bell jar: φ250x340mm Evaporated glass isolation cover size: φ88x150mm with side opening hole Plasma sputtering coating glass isolation cover size: φ88x150mm
Intake system	Equipped with manual fine-tuning valve, the interface is 1/4 inch ferrule connector
Power requirements	AC 220V 50Hz
Plasma sputtering set	Sputtering voltage	1600V
	Maximum current	50mA
	Target size	2 inches
	Working vacuum	10Pa~20Pa
	Working atmosphere	Requires high purity argon
Thermal evaporation coating set	Number of evaporation sources	2
	Max. current	100A
	Working vacuum	10^-3Pa
	Working atmosphere	Do not need any gas.
	Sample stage	Diameter φ60mm, rotatable
Carbon evaporation set	Evaporation method	Carbon rod evaporation
	Max. current	160A
	Working vacuum	10^-3Pa
	Working atmosphere	Do not need any gas.
Vacuum system	Product model	HS-GZK103-A
	Molecular pump	Turbomolecular pump
	Backing pump	Two-stage otary vane pump
	Pumping rate	Molecular pump: 600L/S	Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
		Rotary vane pump: 1.1L/S
	Ultimate vacuum	5×10E-4Pa
	Pumping port	KF40
	Exhaust interface	KF16
	Vacuum measurement	Compound vacuum gauge

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