model | Effective space | Maximum temperature(℃) | Operating temperature(℃) | Fillable gas | Vacuum leak rate(Pa/h) | Ultimate vacuum(Pa) | Temperature uniformity(℃) | Plate area | Total power(KW) |
MIM-4415 | 400*400*1500 | 1600℃ | 1500℃ | N2 Ar H2 | 3 | 1 | ≤±3℃ | 8.6Square meter | 160 |
MIM-5518 | 500*500*2000 | 1600℃ | 1500℃ | N2 Ar H2 | 3 | 1 | ≤±5℃ | Square meter | 220 |
MIM-5527 | 500*500*2700 | 1600℃ | 1500℃ | N2 Ar H2 | 3 | 1 | ≤±5℃ | 25Square meter | 400 |