Power supply | AC220V, 50Hz |
Chamber material | PTFE |
Upper cover | PVC (Polyvinyl chloride, for observing the coating state conveniently) |
Sample stage | Gold-plated copper plate, with good thermal conductivity |
Substrate size | Diameter ≤ 4 inches (100mm) |
Heating mode | Ceramic heating ring |
Operating temperature | RT-200℃ |
Rotation speed | 0-3000rpm |
Speed resolution | 1rpm |
Operation Mode | 7 inch HD LCD touch screen |
Glue dropping mode | Manual glue dispensing, liquid can be supplied during spin coating |
Liquid drain pipe and waste liquid tank | PTFE |
Spin coating curve | Each curve has 5 segments, a total of 5 curves can be stored |
Vacuum chuck | Gold-plated, 3 pieces with diameters of 10mm, 25mm, 55mm |
vacuum pump | Oil-less pump |
Pumping speed | 50 L/min |